The optimal design of the dumping hole in a micro ultrasonic sensor

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  • マイクロ超音波センサにおけるダンピングホールの最適設計
  • マイクロ チョウオンパ センサ ニ オケル ダンピングホール ノ サイテキ セッケイ

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The final goal of this research is to develop a condenser type micro ultrasonic sensor for both use of transmitter and receiver. In this paper, the design of the damping holes of this sensor, which realizes the optimal damping ratio of 1/√2, is investigated in advance of fabrication. First, the theoretical closed form solution for the damping ratio is derived, which is compared with FEM simulation results. Second, while the size of one damping hole and the number of it are changed, the damping ratio is simulated by FEM method. It is proved that the damping ratio is inversely proportional to the radius and the number of the holes. The optimal damping ratio of 1/√2 is achieved in this simulation, which will be experimentally confirmed in future.

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