Development of Glass GEM

DOI

Mitsuya Yuki

Department of Nuclear Engineering and Management, School of Engineering, The University of Tokyo
Takahashi Hiroyuki

Department of Nuclear Engineering and Management, School of Engineering, The University of Tokyo
Fujiwara Takeshi

Nuclear Professional School, School of Engineering, The University of Tokyo

Bibliographic Information

Other Title

GEMはマイクロパターンガス検出器として広く知られているが、本研究では、感光性のガラス基板を用いてフォトリソグラフィにより微細な孔を多数作ったGlass GEMを試作し、性能の向上が見られたので、その概要について報告する。

Proceedings of Annual / Fall Meetings of Atomic Energy Society of Japan

Proceedings of Annual / Fall Meetings of Atomic Energy Society of Japan 2011s (0), 92-92, 2011

Atomic Energy Society of Japan