J111033 Manufacturing Method of Micro-Structured Parts by Nanoimprint Plastic Mold Insert MIM using Nano-sized Copper Powder

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  • J111033 ナノ銅粉末を用いたナノインプリント樹脂型インサートMIMによるマイクロ構造体の製造法([J11103]マイクロナノ理工学:nmからmmまでの表面制御とその応用(3))

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This study aims to develop the manufacturing method of micro-structured parts by the metal powder injection molding (MIM) inserted micro-sacrificial plastic molds which were prepared by nano-imprint lithography (NIL) technique. In this process named NIL/p-SPiMIM, the feedstock composed of nanoscale copper powder and polyacetal-based binder was adequately prepared and molded into polymethylmethacrylate films with fine line-scan structures, and it was sintered in a reductive gas atmosphere followed by solvent debinding of the films. The filling rate of feedstock into micro-channels and transcriptional property in sintered parts was evaluated by SEM observation. It can be concluded that the manufacturing method named NIL/R-SPiMIM proposed in this study has great potential to produce precisely 3 dimensional complex metallic parts with fine micro-structures.

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