J054062 Study on High Sensitivity Calorimeter with MEMS Sensor

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  • J054062 MEMSセンサを用いた高感度カロリメータの研究([J05406]マイクロ・ナノスケールの熱流体現象(6))

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Cells and microorganisms always generate metabolic heat as long as they are alive. So, total biological activity can be measured through the observation of metabolic heat at non-invasive and non-destructive, which is referred as "Bio-calorimetry". With downsizing and improvement in sensitivity of Calorimeters, the bio-calorimetry is expected to contribute in the medical, pharmacy and biotechnology. To use the MEMS (Micro Electro Mechanical System) technology, a bio-calorimetry can be measured a small heat generation. Therefore, we intended to development of high sensitivity and high resolution calorimeter with the MEMS technology. In this study, the batch type calorimeter with MEMS thermopile sensor was made, and its performance and thermal monitoring of Yeast metabolism were tested. As a result, the calorimeter evaluated a sensitivity of 2.6 V/W, a thermal noise equivalent to 23nW.For the thermal monitoring of the Yeast, the metabolic heat generation over 20 nW level was measured. In addition, we reported a flow type calorimeter with MEMS thermopile sensor for studying a biological response to a chemical stuff.

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