書誌事項
- タイトル別名
-
- Development of Fabrication Process of Graphene Nano-ribbon for Flexible Strain Sensor
抄録
<p>In aging society with fewer children, the development of medical engineering technologies is strongly demanded for keeping enough nursing cares. One of the expected technologies is human motion detection using strain sensor. To detect human motion, a strain sensor must have high sensitivity and high deformability. However, conventional strain sensors don't satisfy these requirements. Recently, large attention has been focused on graphene as a sensing part for next-generation strain sensor with high sensitivity and large deformability. Graphene is a two-dimensional carbon sheet composed of π-conjugated network of sp2 carbons, having large deformability, high electron mobility and some outstanding properties. It is well known that graphene nano-ribbon, which is cut from graphene into nano-scale, shows semiconducting properties. Since semiconductor material has high strain sensitivity based on piezoresistive effect, graphene nano-ribbon can be used for highly sensitive and deformable strain sensor. In this study, to fabricate graphene nano-ribbon and measure its I-V characteristics, thermal CVD (chemical vapor deposition) using C2H2, metallic electrodes fabrication using EB evaporation and micromachining using EB(electron beam) lithography were employed. The fabrication of graphene nano-ribbon with metallic electrodes and measurement of I-V characteristics were succeeded.</p>
収録刊行物
-
- 年次大会
-
年次大会 2017 (0), J0330204-, 2017
一般社団法人 日本機械学会
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1390001205843287168
-
- NII論文ID
- 130006550171
-
- ISSN
- 24242667
-
- 本文言語コード
- ja
-
- データソース種別
-
- JaLC
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可