312 真直度形状測定のための最小不確かさ評価に基づくソフトウエアデータムに関する研究(計測)

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  • 312 Software datum for straightness porfile measurement based on least uncertainty criterion

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Conventional software datums for straightness profile measurement are error separation techniques that separate a surface profile from parasitic motions by using multiple sensors and/or multiple arrangements. However, random error propagation of the multiple sensor method has been reported in the case of large sampling numbers. The authors already proposed the novel two-point method for straightness profile measurement. The proposed method can reduce the propagation of uncertainty caused by the cross-axis motion, pitch motion and random error of the estimated surface profile. The proposed method consists of a weighted addition and inverse filtering. The suitable weight of the weighted addition that gives the least uncertainty propagation is derived by a simple equation using the standard deviation of the cross-axis motion, pitch motion and random error. Here, the authors discussed the characteristics of the pitch motion in the spatial frequency domain.

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