207 Biaxial Stress Measurement Method Using Crystal Orientation of Grown Grains in Electrodeposited Copper Foil

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  • ONO Yuichi
    Tottori University, Dept. of Mechanical and Aerospace Engineering
  • YANAGIMOTO Masahiro
    Tottori University, Dept. of Mechanical and Aerospace Engineering
  • MARUHISA Toru
    Tottori University, Dept. of Mechanical and Aerospace Engineering
  • HAYASHI Hiroki
    Tottori University, Dept. of Mechanical and Aerospace Engineering

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  • 207 銅薄膜に発生する成長粒子の結晶方位に着目した二軸応力測定法(材料力学IV)

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