Semiconductor 3D Photonic Crystals(<Special Issue>Photonic Crystals)

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  • Noda Susumu
    Depatment of Electronic Science and Engineering, Kyoto University

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  • 半導体3次元フォトニック結晶(<小特集>フォトニック結晶)
  • 半導体3次元フォトニック結晶
  • ハンドウタイ 3ジゲン フォトニック ケッショウ

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Abstract

An artificial crystal structure has been fabricated exhibiting a full three-dimensional photonic bandgap effect at mid-infrared to optical communication wavelengths. The photonic crystal was constructed by stacking micrometer to sub-micrometer period semiconductor stripes with the accuracy of 30 nm by advanced wafer-fusion technique. The bandgap effect of larger than 40 dB (corresponds to 99.99% reflection) was successfully achieved. The result encourages us to create an ultra-small optical integrated circuit including a three-dimensional photonic crystal waveguide with sharp bend.

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