Theoretical Studies of Epitaxial Growth on Semiconductor Lattice-Mismatched Systems Relation between Macroscopic Growth Behavior and Microscopic Mechanism : Theory of Crystal Growth(<Special Issue>Frontiers of Thin Film Crystal Growth for the New Millennium)
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- Shiraishi Kenji
- NTT Basic Research Laboratories
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- Oyama Norihisa
- National Research Institute for Metals
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- Okajima Ko
- Department of Material Science and Engineering, Waseda University
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- Takeda Kyozaburo
- Department of Material Science and Engineering, Waseda University
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- Yamaguchi Hiroshi
- NTT Basic Research Laboratories
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- Ito Tomonori
- Department of Physics Engineering, Mie University
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- Ohta Eiji
- Department of Applied Physics and phisico-Infomatics, Keio University
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- Ohno Takahisa
- National Research Institute for Metals
Bibliographic Information
- Other Title
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- 半導体格子不整合系におけるエピタキシャル成長の理論的研究 : マクロスコピックな成長過程とミクロスコピックな機構との関係 : 結晶成長の理論(<特集>21世紀を拓く薄膜結晶成長)
- 半導体格子不整合系におけるエピタキシャル成長の理論的研究--マクロスコピックな成長過程とミクロスコピックな機構との関係
- ハンドウタイ ゴウシ フセイゴウケイ ニ オケル エピタキシャル セイチョウ ノ リロンテキ ケンキュウ マクロスコピック ナ セイチョウ カテイ ト ミクロスコピック ナ キコウ ト ノ カンケイ
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Abstract
We discuss the relation between microscopic mechanism and macroscopic growth behavior. First, we introduce a macroscopic theory of growth behavior in semiconductor heteroepitaxy that includes the effects of the formation of Stranski-Krastanov (SK) islands and the misfit-dislocations (MDs). This theory can reproduce the various types of growth behavior observed in heteroepitaxial growth. Next, we have formulated a procedure for determining the phenomenological parameters that includes atomistic calculations. The critical thickness of InAs/GaAs (110) obtained by this procedure is in good agreement with the experimentally obtained value.
Journal
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- Journal of the Japanese Association for Crystal Growth
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Journal of the Japanese Association for Crystal Growth 27 (4), 250-256, 2000
The Japanese Association for Crystal Growth
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Details 詳細情報について
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- CRID
- 1390001205862619776
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- NII Article ID
- 110002715437
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- NII Book ID
- AN00188386
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- ISSN
- 21878366
- 03856275
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- HANDLE
- 10076/8498
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- NDL BIB ID
- 5528766
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- Text Lang
- ja
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- Data Source
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- JaLC
- IRDB
- NDL
- CiNii Articles
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- Abstract License Flag
- Disallowed