22aA3 CZ-Si成長用石英るつぼ中気泡の挙動その場観察(バルク成長I)

DOI

書誌事項

タイトル別名
  • 22aA3 In Situ Observation of Behavior of Bubbles in Silica Glass for use in Silicon Crystal Growth as Crucibles

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説明

Behavior of bubbles in silica glass for growing silicon crystals as crucibles at 1500℃ was observed in site. A large number of bubbles scarcely moved in the silica glass. The bubbies were expanded with the holding time. A small number of bubbies disappeared on heating.

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詳細情報 詳細情報について

  • CRID
    1390001205863653120
  • NII論文ID
    110002769090
  • NII書誌ID
    AN00188386
  • DOI
    10.19009/jjacg.26.2_4
  • ISSN
    21878366
    03856275
  • 本文言語コード
    ja
  • データソース種別
    • JaLC
    • CiNii Articles
  • 抄録ライセンスフラグ
    使用不可

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