909 Polishing Characteristics of Difficult to machine Materials Under Various Controlled Atmospheres Using Bell-Jar Type CMP Machine
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- EGASHlRA Takateru
- Kyushu university
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- DOI Toshiro
- Kyushu university
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- KUROKAWA Syuhei
- Kyushu university
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- OHNISHI Osamu
- Kyushu university
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- UNEDA Michio
- Kyushu university:Kanazawa Institute of Technology
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- KOSHIlYAMA Isamu
- Koshiyama Science and Technology Foundation
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- ICHIKAWA Daizo
- Fujikoshi Machinery Corp.
Bibliographic Information
- Other Title
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- 909 Bell-Jar型CMP装置による各種加工雰囲気下での難加工材料の加工特性(CMP加工2)
Journal
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- The Proceedings of Conference of Kyushu Branch
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The Proceedings of Conference of Kyushu Branch 2012.65 (0), 323-324, 2012
The Japan Society of Mechanical Engineers
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Details 詳細情報について
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- CRID
- 1390001205865599616
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- NII Article ID
- 110009952497
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- ISSN
- 24242780
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles