レーザ加工における熱影響部の弾塑性解析

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  • Elastic-Plastic Analysis of the Heat Affected Zone in Laser Processing

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<p>A dicing processing how a highly concentrated laser is irradiated intermittently in inside the brittle material is called stealth dicing.This technique has many merits such as not using the cleaning solvent in comparison with the existing technique.The propriety of processing depends on the damage due to the laser. However, the influence of the damage to the quality of the product should be discussed.The creation of this damage region is in an instant and under the high temperature environment.Therefore, this influence can not be discussed by an experimental approach.For this reason, this influence is inspected by the numerical approach based on the body force method (BFM).BFM is one of numerical analysis technique of boundary type, and based on the principal of superposition.Moreover, the non-linear problem is treated to the analytical objection directly.In this research, the damage region is evaluated by the shape of plastic region. In the analytical model, the thermal stress due to the laser is regarded as the inner pressure acting on the circular hole on account of the local temperature rise.In addition, the processing line is expressed by free edge through the center of the circular hole.This paper discussed about the relation the distance of the irradiated points and the shape of plastic region.It was found from the numerical analysis that the plastic region on the cleaving surface is large influenced by the distance of the irradiated points.</p>

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