C133 固体面上の極薄液膜の蒸発挙動(OS-11 ナノスケール伝熱III)

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  • C133 Evaporation Characteristics of an Ultra Thin Liquid Film on a Solid Surface

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Experimental study on evaporation of thin liquid film has been conducted to understand the molecular-scale transport phenomena at liquid-vapor interface. The Fizeau interference method was utilized for transient measurements of the thickness of liquid film on hydrophilic surface. A thin-film thermocouple made of copper and nickel was also formed on the surface of silicon wafer for a direct measurement of solid surface temperature. The optical measurements show that the evaporation rate increases with the decrease of film thickness and have a possibility of better evaluation of the condensation coefficient.

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