Development of the Calibration Facility for Small Mass Flow Rates of Gases and the Sonic Venturi Nozzle Transfer Standard.

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  • 気体用微小質量流量校正装置の開発と標準移転用流量計としての音速ノズルの特性
  • キタイヨウ ビショウ シツリョウ リュウリョウ コウセイ ソウチ ノ カイハツ ト ヒョウジュン イテンヨウ リュウリョウケイ ト シテ ノ オンソク ノズル ノ トクセイ

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Abstract

A calibration facility based on gravimetric method has been developed at NRLM for small mass flow rates of gas. This calibration facility establishes a primary gas flow rate measurement standard in Japan with an extended standard uncertainty of 0.12 percent at maximum, in mass flow rates from 0.01 g/min to 50 g/min for nitrogen. Five sonic Venturi nozzles were tested using this facility and the results showed that they can work well as a flow transfer standard for small mass flow rates. These sonic Venturi nozzles can be used to establish flow transfer standards within an extended standard uncertainty of 0.15 percent.

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