Turnkey Systems for Manufacturing Large Area Thin Film Silicon Module(<Special Issue>Crystals Science and Technology of Solar Cells Materials -Concentrated on Crystal Growth-)

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  • Ishida Hiroshi
    PVE BU Oerlikon Systems Dept. Tokyo Electron LTD World Headquarters
  • Umeshita Naoki
    PVE BU Oerlikon Systems FE Dept. Tokyo Electron FE LTD Nirasaki Office
  • Sugawara Takuya
    PVE BU Oerlikon Systems FE Dept. Tokyo Electron FE LTD Nirasaki Office

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  • 大面積薄膜シリコン太陽電池の一貫製造ラインについて(<特集>太陽電池材料の結晶工学:結晶成長を中心に)
  • 大面積薄膜シリコン太陽電池の一貫製造ラインについて
  • ダイ メンセキ ハクマク シリコン タイヨウ デンチ ノ イッカン セイゾウ ライン ニ ツイテ

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Abstract

Large area thin film solar cell module is expected to increase its market share especially in photovoltaic power plants which require further total cost reduction and large-scale manufacturing. To respond such requirements, Oerlikon solar provides thin film silicon solar cell Turnkey system. In this paper, we explain the key technology of large area thin film silicon solar cell manufacturing, mainly focus on VHF-plasma-CVD and LPCVD ZnO processes. The advantages of Oerlikon Solar turnkey system based on these excellent process technologies are also discussed.

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