Stitching technique for a wide range of observation area using Electron Probe Surface Roughness Analyzer

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  • 307 電子線三次元粗さ計測装置における広領域多視野ステッチング

Abstract

In 3D measurement using electron beam you can obtain extremely high precision information for an area electron beam can scan. However, there has been a strong demand for high resolution measurement of wider areas. This system, which is capable of stitching multiple image fields captured in high precision, now satisfies this demand. Problem solutions in stitching and data obtained are introduced below.

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