B28 超微細塑性加工を利用した二次元規則配列ナノドットアレイの効率的製造法の開発(OS12 ナノ加工と表面機能(2))

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  • B28 Efficient Fabrication of 2D Ordered Nano-dot Array Using Nano Plastic Forming

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In this paper, fabrication of a 2D ordered nano-dot array using the combination of Nano Plastic Forming and annealing processes is reported. Experimental works are conducted to confirm its feasibility. First, quartz glass substrate is coated with a thin layer of gold (10nm). Second, a knife edge diamond tool is utilized in the Nano Plastic Forming process to fabricate cross pattern with various pitch settings on quartz glass and gold layer surface. Third, the substrate is annealed at 700℃ for 10 minutes to induce self-organization. As a result, 2D gold nano-dot array down to 100nm size with 250nm pitch is successfully obtained on the surface of quartz glass.

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