A26 Mechanism of Material Removal in Nanomachining using AFM Diamond Tip(M4 processes and micro-manufacturing for science)

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  • ICHIDA Yoshio
    Department of Mechanical and Intelligent Engineering, Graduate School of Engineering, Utsunomiya University
  • YAMAGUCH Takashi
    Department of Mechanical and Intelligent Engineering, Graduate School of Engineering, Utsunomiya University
  • SASANUMA Makoto
    Department of Mechanical and Intelligent Engineering, Graduate School of Engineering, Utsunomiya University

Description

Nanoscale machining experimets on the fused quartz surface has been performed using an atomic force microscope combined with a two-axis capacitive force/displacement transducer. The minimum normal force f_<nP> when a reproducible groove begins to be formed with an increase in normal force f_n is about 4.7 μN. The minimum critical normal force f_<nR>, tangential force f_<tR> and groove depth d_<gR> when the material removal process begins with an increase in normal force are 33.7 μN, 18.7 μN and 4.3 nm, respectively. The feature change in swelling ratio R_s and the ratio of force components f_l/f_n at the critical normal force f_<nR> can be used to detect a critical condition when the material deformation behavior changes from the plastic deformation to the removal process.

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