Powder Jet Deposition of Ceramic Films(M^4 processes and micro-manufacturing for science)

YOSHIHARA Nobuhito, KURIYAGAWA Tsunemoto, YASUTOMI Yuya, OGAWA Kazuhiro

doi:10.1299/jsmelem.2005.2.833

Powder Jet Deposition of Ceramic Films(M^4 processes and micro-manufacturing for science)

YOSHIHARA Nobuhito

Department of Nanomechanics, Tohoku University
KURIYAGAWA Tsunemoto

Department of Nanomechanics, Tohoku University
YASUTOMI Yuya

Department of Nanomechanics, Tohoku University
OGAWA Kazuhiro

Fracture and Reliability Research Institute, Tohoku University

説明

Ceramic films are needed in micro-electro-mechanical systems as insulating, piezoelectric and ferroelectric materials. The required film thickness is 1-10μm. This is too thin to machine by polishing or grinding, and too thick to grow by chemical or physical vapor deposition. The present study proposes a new method called powder jet deposition (PJD) for fabricating ceramic films 1-10μm in thickness. Indentation and scratching tests are performed on ceramic films deposited by the PJD method. It is found that the hardness of the films depends on PJD conditions.

収録刊行物

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2005.2 (0), 833-838, 2005

一般社団法人日本機械学会