M2-5 LIGAプロセス用高強度電鋳Ni合金の開発と微小試験片による疲労強度特性(M2 材料評価)

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  • M2-5 Development of high strength electroformed Ni-Alloy for LIGA Process and the fatigue properties evaluated with micro specimens (M2 MaterialCharacterization)

説明

LIGA process is one of the most promising methods to fabricate metallic micro structures for MEMS and various mechanical components such as IC probes and a micro spray nozzle. The process is composed of photolithography and electroforming of metals and alloys such as Ni and Ni-Co. In the present study, we developed new electroformed Ni-Pd alloy and confirmed its superior mechanical properties in tensile strength of 2.2 GPa and fatigue strength of 1.8 GPa. A palmtop tensile testing machine and a fatigue testing machine were especially developed for small thin specimens fabricated by LIGA process. The stiffness of the specimens were quite low compared with the conventional large-sized specimens, so the machines were especially designed in dimensions of the specimens, loading mechanism, and the measuring method of load and displacement.

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