138 Effect of the Crystallinity of Underlayer Material on Microtexture of electroplated Copper thin Film

  • LIU Jiatong
    Department of Nanomechanics, Graduate School of Engineering, Tohoku University
  • SUZUKI Ken
    Department of Nanomechanics, Graduate School of Engineering, Tohoku University
  • MIURA Hideo
    Department of Nanomechanics, Graduate School of Engineering, Tohoku University

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  • 138 めっき下地材質のめっき銅薄膜微細組織への影響

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