138 Effect of the Crystallinity of Underlayer Material on Microtexture of electroplated Copper thin Film
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- LIU Jiatong
- Department of Nanomechanics, Graduate School of Engineering, Tohoku University
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- SUZUKI Ken
- Department of Nanomechanics, Graduate School of Engineering, Tohoku University
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- MIURA Hideo
- Department of Nanomechanics, Graduate School of Engineering, Tohoku University
Bibliographic Information
- Other Title
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- 138 めっき下地材質のめっき銅薄膜微細組織への影響
Journal
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- The Proceedings of Conference of Tohoku Branch
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The Proceedings of Conference of Tohoku Branch 2016.51 (0), 73-74, 2016
The Japan Society of Mechanical Engineers
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Details 詳細情報について
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- CRID
- 1390001205942633728
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- NII Article ID
- 110010044808
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- ISSN
- 24242713
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles