Data Correction Method for Dynamic Measurements by Optical Lever AFM

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  • 光てこ法によるAFMダイナミック計測における補正手法の研究(J23-3 マイクロナノ理工学(3),J23 マイクロナノ理工学)

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The free and forced vibrations of a cantilever used in an atomic force microscope (AFM) have been analysed and the amplitude of the vibration of the cantilever end that will be measured by using the optical lever method has been predicted theoretically. It was found that the predicted amplitude includes errors and correction of the amplitude depending on the vibration freqency is necessary. The expression of the correction factor has been derived and presented. This results are useful for ultrahigh accuracy measurements, especially dynamic measurements, using the AFM.

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