1331 磁歪材料を用いた運動機能素子に及ぼす基板種類と厚さの影響(J14-7 知的材料・構造システム(7) 各種アクチュエータ,ジョイントセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)
書誌事項
- タイトル別名
-
- 1331 Influence of Substrate Materials and their Thickness on Magnetostrictive Mover Device
説明
Influences of deformation resistance on bending motion angle, strain and force of composite mover device driven by magnetic field of Fe-45at%Pd alloy thin film deposited on titanium, substrate thickness by direct current magnetron sputtering process were investigated. When the residual gas pressure before argon sputtering and the sputtering pressure of argon gas (5 N) were less than 5.0×10^<-4> Pa and 2.0×10^<-1> Pa, respectively, the thickness of the Fe-45at%Pd films deposited was about 2.5μm. Bending motion strain of Fe-45at%Pd alloy film largely depended on the bending deformation resistance controlled by substrate thickness from 50 to 300μm. The largest strain of bending motion induced by magnetic field and its highest susceptibility were found in the Fe-45%Pd alloy film deposited on titanium thin sheet of 50μm thickness.
収録刊行物
-
- 年次大会講演論文集
-
年次大会講演論文集 2008.6 (0), 399-400, 2008
一般社団法人 日本機械学会
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1390001206062810752
-
- NII論文ID
- 110007659457
-
- ISSN
- 24331325
-
- 本文言語コード
- ja
-
- データソース種別
-
- JaLC
- Crossref
- CiNii Articles
- OpenAIRE
-
- 抄録ライセンスフラグ
- 使用不可