S1303-2-4 Development of a high sensitive angle sensor by using a single cell photodiode

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  • SUZUKI Tatsuro
    Nano-Metrology and Control Lab, Department of Nanomechanics, Tohoku University
  • SAITO Yusuke
    Nano-Metrology and Control Lab, Department of Nanomechanics, Tohoku University
  • ARAI Yoshikazu
    Nano-Metrology and Control Lab, Department of Nanomechanics, Tohoku University
  • GAO Wei
    Nano-Metrology and Control Lab, Department of Nanomechanics, Tohoku University

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Other Title
  • S1303-2-4 非分割型PDを用いた高感度角度センサに関する研究(加工計測・評価システム(2))

Abstract

This paper describes a highly sensitive two-axis angle sensor by using a single cell photodiode for measurement of surface profiles and error motions. The sensor, which is based on the principle of the laser autocollimation, employs a laser diode as the light source. The reflected beam from the target surface is received by an autocollimation unit consisting of an objective lens and a light spot position-sensing detector located at the focal position of the lens. It is confirmed that the sensor sensitivity depends on the spot size on the focal position and a single cell photodiode is employed as the light spot position-sensing detector to sense the position of the light spot at the focal position. A prototype two-axis angle sensor with a dimensional of 65 mm (W) × 70 mm (L) × 40 mm (H) is designed and constructed. Experimental results have shown that the sensor has a sensitivity of ±3 %/arc-seconds and a resolution of ±0.03 arc-seconds.

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