3311 ナローギャップ櫛歯型アクチュエータの作製とその特性(J26-2 マイクロメカトロニクス(2),J26 マイクロメカトロニクス)

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  • 3311 The development of Narrow Gap Comb-Drive Actuator and the characteristic

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We have developed a method of resist patterning using a knife edge probe for fabrication of narrow gap comb-drive actuators. According to a theoretical formulation of a comb-drive actuator, the gap between both opposing comb electrodes strongly affects its electrical property, especially Q-factor. An equivalent circuit of the comb-drive actuator was also conducted to evaluate effects of the gap. The patterning was done by AFM in which a photo resist layer was carved by a knife edge probe. The fabricated pattern was then transformed to an aluminum layer which was used for a mask of Si ethicng. Using this method we have obtained very small trench structure having 460nm in width and established aspect ratio of more than 50.

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