2826 櫛歯アクチュエータの電子素子表現と自励発振回路解析への応用(S08-1 微小機械設計・開発のための実験力学の新展開(1),S08 微小機械設計・開発のための実験力学の新展開)

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  • 2826 Expression of a comb-drive actuator with passive electronic elements and its application to analysis of a self-oscillation circuit

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We report an analysis of a self-excitation oscillation circuit in which a comb-drive is inserted in its positive feedback loop. From the Lagrange equation of a comb-drive actuator, drive point impedance of the comb-drive actuator was first derived. The drive point impedance was then expanded partial fractions; this means the drive point impedance can be expressed by series of a peculiar simple electrical circuit. We analyzed a self-excitation oscillation circuit by SPICE simulator and found that the oscillation wave form show good agreement between the simulation and experiment.

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