界面はく離を考慮した燃焼炎法によるMo基板表面へのダイヤモンド皮膜合成(OS5-3 コーティング/基材の界面強度,OS5 コーティングプロセスとその皮膜特性評価)

DOI DOI DOI Web Site Web Site ほか2件をすべて表示 一部だけ表示 被引用文献8件 参考文献11件 オープンアクセス

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  • Synthesize of Diamond Film on Molybdenum Substrate Surface by Combustion Flame Considering the Delamination of the Interface
  • 界面はく離を考慮した燃焼炎法によるＭｏ基板表面へのダイヤモンド皮膜合成
  • カイメン ハクリ オ コウリョ シタ ネンショウエンホウ ニ ヨル Mo キバン ヒョウメン エ ノ ダイヤモンド ヒマク ゴウセイ
  • Synthesis of Diamond Film on Molybdenum Substrate Surface by Combustion Flame Considering the Delamination of the Interface

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説明

Diamond films were synthesized on a Mo substrate using combustion flame. During cooling process, the most diamond films delaminated between the diamond film and the Mo substrate. It was caused by the thermal stress due to a mismatch of the thermal expansion between the diamond film and the Mo substrate. In this study, a three-step synthesis method was proposed and prevented the film from the delamination. In the first step, the Mo 2 C and the diamond phases were synthesized on the Mo substrate, but the diamond phase was synthesized in the second and the third steps. The interfacial stress between the film and substrate was calculated by a finite element method. According to the results, the interfacial stress in the film made by the three-step synthesis method was smaller than that by the one-step synthesis method. The three-step method is useful for synthesizing the diamond film.

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