Anomalous Junction Leakage Behavior of Ti Self Aligned Silicide Contacts on Ultra-Shallow Junctions.
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- Sakata Atsuko
- Microelectronics Engineering Laboratory, Toshiba Corporation, 1 Komukai, Toshiba–cho, Saiwai–ku, Kawasaki 210, Japan
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- Tomita Mitsuhiro
- Environmental Engineering Laboratory, Toshiba Corporation, 1 Komukai, Toshiba–cho, Saiwai–ku, Kawasaki 210, Japan
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- Koike Mitsuo
- Environmental Engineering Laboratory, Toshiba Corporation, 1 Komukai, Toshiba–cho, Saiwai–ku, Kawasaki 210, Japan
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- Koyama Masato
- ULSI Research Laboratories, Toshiba Corporation, 1 Komukai, Toshiba–cho, Saiwai–ku, Kawasaki 210, Japan
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- Kunishima Iwao
- ULSI Research Laboratories, Toshiba Corporation, 1 Komukai, Toshiba–cho, Saiwai–ku, Kawasaki 210, Japan
書誌事項
- タイトル別名
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- Anomalous Junction Leakage Behavior of
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抄録
An anomalous junction leakage is observed in Ti self aligned silicide (Ti-SALICIDE) contacts on ultra-shallow junctions less than 0.1 µ m. After annealing at around 460° C for 30 min, the leakage current increases considerably for n+/p junctions and decreases slightly for p+/n junctions. At a reverse bias of 1 V, the activation energies of the leakage current for n+/p junctions and p+/n junctions annealed at 460° C for 30 min are 0.16 eV and 0.97 eV, respectively. The very small activation energy for the n+/p junction can be explained by a tunneling current. The results of secondary-ion mass spectroscopy (SIMS), transmission electron microscopy (TEM) and energy-dispersive X-ray spectroscopy (EDX) analyses indicate that a considerable amount of Ti diffuses into n+-Si at around 460° C. However, only a small amount of Ti diffuses into p+-Si. This anomalous junction leakage can be explained in terms of tunneling assisted by traps due to the diffused Ti. These low temperature phenomena are thought to represent the process in the early stage of Ti silicidation.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 36 (3B), 1558-1562, 1997
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390001206247701504
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- NII論文ID
- 110003946841
- 130004523474
- 210000040813
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 4196666
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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