Atomic Force Microscope Observation of the Change in Shape and Subsequent Disappearance of "Crystal-Originated Particles" after Hydrogen-Atmosphere Thermal Annealing.
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- Yanase Yoshio
- Research and Development Center, Sumitomo Sitix Corporation, Kohoku, Kishima–gun, Saga 849–05, Japan
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- Nishihata Hideki
- Research and Development Center, Sumitomo Sitix Corporation, Kohoku, Kishima–gun, Saga 849–05, Japan
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- Ochiai Takashi
- Research and Development Center, Sumitomo Sitix Corporation, Kohoku, Kishima–gun, Saga 849–05, Japan
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- Tsuya Hideki
- Research and Development Center, Sumitomo Sitix Corporation, Kohoku, Kishima–gun, Saga 849–05, Japan
書誌事項
- タイトル別名
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- Atomic Force Microscope Observation of
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説明
The change in shape and the disappearance of “crystal-originated particles (COPs)” on silicon (111) and (001) surfaces after high-temperature annealing in hydrogen (H2) atmosphere were observed using an atomic force microscope (AFM). It was found that after a very short anneal at 1000°C in H2 atmosphere, the COP width across the wafer surface increases and its depth into the wafer bulk becomes more shallow. Also, as the H2 annealing temperature increases, the time taken for complete COP disappearance decreased. The process of the change in shape and the subsequent disappearance of COPs on silicon (111) and (001) surfaces after H2 annealing was characterized and discussed in terms of the etching effect and reconstruction of silicon atoms.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 37 (1), 1-4, 1998
The Japan Society of Applied Physics
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キーワード
詳細情報 詳細情報について
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- CRID
- 1390001206248225792
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- NII論文ID
- 210000042738
- 30021830594
- 110003906153
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- NII書誌ID
- AA10457675
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- COI
- 1:CAS:528:DyaK1cXpvFSksA%3D%3D
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 4405886
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可