Defect Characterization of Sputter Deposited Au Contacts on N-Type Si<sub>1-x</sub>Ge<sub>x</sub>
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- Goodman Stewart A.
- Physics Department, University of Pretoria, Pretoria, 0002, South Africa
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- Auret F. D.
- Physics Department, University of Pretoria, Pretoria, 0002, South Africa
書誌事項
- タイトル別名
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- Defect Characterization of Sputter Deposited Au Contacts on N-Type Si1-xGex.
- Defect Characterization of Sputter Depo
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Sputter deposition of metal Schottky contacts on semiconductors creates damage at and below the surface, often resulting in inferior rectification properties. We have used deep-level transient spectroscopy (DLTS) in an investigation of the electronic properties of defects introduced in n-Si1- xGe x (x=0.0 to 0.25) during RF sputter deposition of 500 nm thick Au Schottky barrier diodes (SBDs). Seven discrete electron defects (ES1-ES7) and a band of defects with a continuous distribution were detected after this processing stage. The defects are compared to those detected in the same material after high and low energy alpha-particle irradiation. It was seen that ES5 detected after sputter deposition is actually two peaks superimposed on each other. Contributions from the E-centre and the divacancy make up this DLTS peak. ES5 has a similar DLTS signature to EA2 introduced during high energy (5.4 MeV) alpha-particle irradiation.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 36 (2), 633-637, 1997
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390001206249217536
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- NII論文ID
- 210000041876
- 110003905631
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 4176212
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- CiNii Articles
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- 使用不可