Characterization of Bimetallic Cantilever for Chemical Sensor Application.

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  • Jung Mi–Young
    Research Center for Atomic Scale Surface Science, Yon–Sei University, Seoul 120–749, Korea
  • Kim Dae–Wook
    Department of Physics, Sun Moon University, Asan, ChungNam 336–840, Korea
  • Choi Seong Soo
    Department of Physics, Sun Moon University, Asan, ChungNam 336–840, Korea
  • Kang Chi Jung
    Department of Physics, Seoul National University, Seoul 151–742, Korea
  • Kuk Young
    Department of Physics, Seoul National University, Seoul 151–742, Korea

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説明

A microcantilever stylus offers various possibilities as a high-sensitivity chemical sensor. For high sensitivity, the cantilever stylus should have a very sharp tip, a low force constant, and a high mechanical frequency. In this work, a technique for sensing thermal reaction using a bimetallic Si3N4 microcantilever is investigated. The temperature change and heat loss of the bimetallic cantilever will lead to an angular bending of the bimetallic lever. Its thermal response was qualitatively examined during an endothermic chemical reaction using the optical deflection method. The chemical substance used in this experiment is tetradecanol, CH3(CH2)13OH, with the known phase transition temperature of 313 K.

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