Estimation of Optical Phase Aberrations of Micro-Optics Components by the Lrradiance Transport Equation

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  • Rios Susana
    Area de Optica, Departamento de Fisica Aplicada, Facultade de Fisica, Universidade de Santiago de Compostela, Campus Sur, 15706 Santiago de Compostela, Galicia, Spain
  • Gato Lazaro
    Area de Optica, Departamento de Fisica Aplicada, Facultade de Fisica, Universidade de Santiago de Compostela, Campus Sur, 15706 Santiago de Compostela, Galicia, Spain
  • Acosta Eva
    Area de Optica, Departamento de Fisica Aplicada, Facultade de Fisica, Universidade de Santiago de Compostela, Campus Sur, 15706 Santiago de Compostela, Galicia, Spain
  • Kato Toshio
    Precission and Intelligence Laboratory, Tokyo Institute of Tecnology, 4259 Nagatsuta, Midoriku, Yohohama 226–8503, Japan
  • Iga Kenichi
    Precission and Intelligence Laboratory, Tokyo Institute of Tecnology, 4259 Nagatsuta, Midoriku, Yohohama 226–8503, Japan

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タイトル別名
  • Estimation of Optical Phase Aberrations of Micro-Optics Components by the Irradiance Transport Equation.
  • Estimation of Optical Phase Aberrations

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A mathematical method for the recovery of the optical phase by using the transport intensity equation is proposed. The method, based on phase decomposition of in orthogonal series expansion, allows us to calculate the least-squares estimation of each mode coefficient of the phase as a weighted integral over intensity measurements. Experimental results of focal length and the third and fifth order spherical aberration of planar microlenses are presented. These results are compared with those of other experimental methods.

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