Reaction of Copper Oxide and β-Diketone for In situ Cleaning of Metal Copper in a Copper Chemical Vapor Deposition Reactor
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- Sekiguchi Atsushi
- Process Development Laboratory, Anelva Corporation, 5-8-1 Yotsuya, Fuchu, Tokyo 183-8508, Japan
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- Kobayashi Akiko
- Process Development Laboratory, Anelva Corporation, 5-8-1 Yotsuya, Fuchu, Tokyo 183-8508, Japan
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- Koide Tomoaki
- Process Development Laboratory, Anelva Corporation, 5-8-1 Yotsuya, Fuchu, Tokyo 183-8508, Japan
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- Okada Osamu
- Process Development Laboratory, Anelva Corporation, 5-8-1 Yotsuya, Fuchu, Tokyo 183-8508, Japan
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- Hosokawa Naokichi
- Process Development Laboratory, Anelva Corporation, 5-8-1 Yotsuya, Fuchu, Tokyo 183-8508, Japan
書誌事項
- タイトル別名
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- Reaction of Copper Oxide and .BETA.-Diketone for In situ Cleaning of Metal Copper in a Copper Chemical Vapor Deposition Reactor.
- Reaction of Copper Oxide and ベータ Diketone for In situ Cleaning of Metal Copper in a Copper Chemical Vapor Deposition Reactor
この論文をさがす
抄録
For in situ cleaning of inner reactor walls of copper chemical vapor deposition chambers used in the copper wiring process of LSI, etching of the deposited metallic copper is carried out by three step processes of copper oxidation, complexation with β-diketone, and vaporization to allow evacuator. In this paper, reactions suitable for the latter two processes are described. Reactions of copper oxide with three kinds of β-diketone, hexafluoroacetylacetone (Hhfac), acetylacetone and dipivaloylmethane, were studied using thermogravimetry in the range from room temperature to 400°C. Only Hhfac reacted with copper oxide showing etching in the temperature range above 170°C. At 350°C the weight ratio etching rate was 0.29 wt%/min at atmospheric pressure and 0.06 wt%/min at 665 Pa. The evaporation rate of the reaction product, Cu(hfac)2, was 5.3 wt%/min at 150°C, which is sufficiently higher than the etching rate of copper oxide. Reactions are as follows: 2CuO→Cu2O+1/2O2, Cu2O+Hhfac→Cu(hfac)+CuOH, 2Cu(hfac)→Cu(hfac)2+Cu, and Cu+CuO→Cu2O.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 39 (11), 6478-6486, 2000
The Japan Society of Applied Physics
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キーワード
詳細情報 詳細情報について
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- CRID
- 1390001206252561024
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- NII論文ID
- 110004055698
- 210000048037
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 5577013
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
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- 抄録ライセンスフラグ
- 使用不可