Crystal Structures of the TiO2 Films on the Quartz Substrate and the Powder formed in the Gaseous Phase by ArF Laser Photolysis of Ti(O-i-C3H7)4.
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- Watanabe Akio
- National Institute of Materials and Chemical Research, 1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
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- Tsuchiya Tetsuo
- National Institute of Materials and Chemical Research, 1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
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- Imai Yoji
- National Institute of Materials and Chemical Research, 1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
Bibliographic Information
- Other Title
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- Crystal Structures of the TiO<sub>2</sub> Films on the Quartz Substrate and the Powder formed in the Gaseous Phase by ArF Laser Photolysis of Ti(O-i-C<sub>3</sub>H<sub>7</sub>)<sub>4</sub>
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Abstract
Decomposition of sublimed vapor of Ti-tetraisopropoxide by ArF laser has been studied by X-ray diffraction. TiO2 crystalline films (anatase) were deposited on the quartz substrate whereas the white powder of rutile was deposited on the inner wall of the chamber through a decomposition reaction in the gaseous phase. The possible reasons for the difference in the crystal structures of the deposits obtained on the substrate and in the gaseous phase are discussed.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 39 (1), 120-123, 2000
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390001206252584704
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- NII Article ID
- 110003956321
- 210000046803
- 130004526643
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- NII Book ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL BIB ID
- 4974841
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed