X-Ray Double-Crystal Diffractometry of Verneuil-Grown SrTiO<sub>3</sub> Crystals

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  • Yoshimura Jun-ichi
    Institute of Inorganic Synthesis, Faculty of Engineering, Yamanashi University, 4-3-11 Takeda, Kofu, Yamanashi 400-8511, Japan
  • Sakamoto Takeshi
    Institute of Inorganic Synthesis, Faculty of Engineering, Yamanashi University, 4-3-11 Takeda, Kofu, Yamanashi 400-8511, Japan
  • Yamanaka Junji
    Institute of Inorganic Synthesis, Faculty of Engineering, Yamanashi University, 4-3-11 Takeda, Kofu, Yamanashi 400-8511, Japan

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  • X-Ray Double-Crystal Diffractometry of Verneuil-Grown SrTiO3 Crystals.

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Using a double-crystal arrangement of nearly parallel setting, X-ray Bragg-case diffraction curves were measured for (100) and (110) surfaces of SrTiO3 crystals, grown by the Verneuil method and used widely as a substrate for fabricating electronic thin film devices. The peak height and half-width of rocking curves (200 and 220 reflections, Cu Kα1) measured from local areas of samples varied over a wide range with the samples and probed areas, presumably due to the effect of dislocations and other imperfections. A certain proportion of the measured curves was in fair agreement with the theoretical curve for a perfect crystal, being only 1-2 arcsec broader in half-width. The local-area rocking curve measurement provides like this useful information on the perfection characterization of SrTiO3 crystals. The measurement shows that mechanochemically polished surfaces of the sample crystals are significantly free of polishing strain in both the (100) and (110) samples, while the assessment of the bulk-crystal perfection by the experimental results needs a discussion. Rocking curves were also measured from the entire surface of the sample crystals to obtain an evaluation of overall misorientaion.

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