Reduction in Feedback Bandwidth of the Force-Controlled Atomic Force Microscope Using a Polyimide Cantilever.
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- Kato Nobuhiro
- Department of Intelligent Mechanics, Faculty of Biology-Oriented Science and Technology, Kinki University, 830 Nishimitani, Uchita-cho, Naga, Wakayama 649-6493, Japan
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- Matsumoto Toshiro
- Department of Intelligent Mechanics, Faculty of Biology-Oriented Science and Technology, Kinki University, 830 Nishimitani, Uchita-cho, Naga, Wakayama 649-6493, Japan
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- Kikuta Hisao
- Graduate school of Engineering, Osaka Prefecture University, 1-1, Gakuen-cho, Sakai, Osaka 599-8531, Japan
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- Nakamura Yasuhiro
- Graduate school of Engineering, Osaka Prefecture University, 1-1, Gakuen-cho, Sakai, Osaka 599-8531, Japan
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- Iwata Koichi
- Graduate school of Engineering, Osaka Prefecture University, 1-1, Gakuen-cho, Sakai, Osaka 599-8531, Japan
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In this paper we present a method of reducing the bandwidth required in the force-controlled atomic force microscope (AFM) for measuring the force curves. System stability strongly depends on the quality factor of vibration (Q) of the cantilever. As polyimide has a low Q, a cantilever fabricated from it reduces the bandwidth required in the feedback system. A polyimide cantilever with dimensions of 540 × 155 × 3.4 μm3 is fabricated to evaluate its Q in vacuum, density and Young's modulus. The measured Q is 50, which is much smaller than those of conventional cantilevers used for AFM. Using the measured mechanical properties of the polyimide, the required frequency response of the feedback system is estimated. Typical force curve measurements are confirmed by some numerical simulations.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 40 (11), 6594-6599, 2001
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390001206253157248
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- NII論文ID
- 210000050267
- 110004043505
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 5986388
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 使用不可