Multichannel 5*5-Site 3-Dimensional Si Microprobe Electrode Array for Neural Activity Recording System
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- Kawano Takeshi
- Department of Electrical and Electronic Engineering, Toyohashi University of Technology
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- Takao Hidekuni
- Department of Electrical and Electronic Engineering, Toyohashi University of Technology
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- Sawada Kazuaki
- Department of Electrical and Electronic Engineering, Toyohashi University of Technology
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- Ishida Makoto
- Department of Electrical and Electronic Engineering, Toyohashi University of Technology
Bibliographic Information
- Other Title
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- Multichannel 5×5-Site 3-Dimensional Si Microprobe Electrode Array for Neural Activity Recording System
- Multichannel 5×5-site 3-dimensional Si micro-probe electrode array for neural activity recording
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Abstract
Multichannel 5×5-site Si microprobe electrode array has been developed for neural activity recording. Si microprobes were fabricated successfully at predetermined sites on a chip using Au dots and Si2H6 gas source molecular beam epitaxy (GS-MBE), a method based on vapor-liquid-solid (VLS) growth. Selective VLS Si growth allowed the design of three-dimensional (3D) microprobes with 40 μm spacing in a 5×5 array. The diameter and the length of the Si probe can be widely changed by changing the Au dot size and the Si growth time, respectively. In addition, the circular-cone-shaped Si probe has a shape suitable for penetration into neural tissues, and can be realized by increasing growth pressure. The mechanical strength of the Si probe was evaluated with observation of its bending and penetration into a gelatin membrane, which indicated that the Si probes are strong enough to withstand the application. Signal recording with the same amplitude as neural activity was also performed using the fabricated Si probe array chip. These results confirm that high-density neural signals from neural tissues can be obtained with the multichannel 3D VLS Si microprobe array chip.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 42 (4B), 2473-2477, 2003
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390001206254841728
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- NII Article ID
- 130004530724
- 10010802243
- 30021865205
- 210000053340
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- NII Book ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL BIB ID
- 6524139
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed