Metalorganic Chemical Vapor Deposition of Thin Film ZrO<sub>2</sub>and Pb(Zr,Ti)O<sub>3</sub>: Precursor Chemistry and Process Characteristics
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- Chen Ing-Shin
- ATMI, Inc., 7 Commerce Drive, Danbury, Connecticut 06810, U.S.A.
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- Hendrix Bryan C.
- ATMI, Inc., 7 Commerce Drive, Danbury, Connecticut 06810, U.S.A.
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- Bilodeau Steven M.
- ATMI, Inc., 7 Commerce Drive, Danbury, Connecticut 06810, U.S.A.
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- Wang Ziyun
- ATMI, Inc., 7 Commerce Drive, Danbury, Connecticut 06810, U.S.A.
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- Xu Chongying
- ATMI, Inc., 7 Commerce Drive, Danbury, Connecticut 06810, U.S.A.
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- Johnston Stephen
- ATMI, Inc., 7 Commerce Drive, Danbury, Connecticut 06810, U.S.A.
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- Buskirk Peter C. Van
- ATMI, Inc., 7 Commerce Drive, Danbury, Connecticut 06810, U.S.A.
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- Baum Thomas H.
- ATMI, Inc., 7 Commerce Drive, Danbury, Connecticut 06810, U.S.A.
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- Roeder Jeffrey F.
- ATMI, Inc., 7 Commerce Drive, Danbury, Connecticut 06810, U.S.A.
書誌事項
- タイトル別名
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- Metalorganic Chemical Vapor Deposition of Thin Film ZrO2 and Pb(Zr,Ti)O3: Precursor Chemistry and Process Characteristics.
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抄録
Metalorganic chemical vapor deposition (MOCVD) process characteristics of several zirconium source reagents were investigated. These source reagents included metal β-diketonates [e.g., Zr(thd)4 where thd = (2,2,6,6-tetramethyl-3,5-heptanedionate)] and metal alkoxide/β-diketonates [e.g., Zr(OiPr)2(thd)2 and Zr(OtBu)2(thd)2]. Thermal properties and transport behaviors of these precursors were examined by thermogravimetric analysis. Zirconium oxide films were deposited on silicon substrates at reduced pressure. Under the process conditions examined, the deposition behavior was mass-transport controlled, and Zr(OiPr)2(thd)2 and Zr(OtBu)2(thd)2 behaved similarly. The films exhibited low carbon content. Pb(Zr, Ti)O3 (PZT) films were deposited on iridium-coated silicon substrates under reduced pressure. Zirconium incorporation efficiency was significantly improved for Zr(OiPr)2(thd)2 when compared to Zr(thd)4. Use of M(OtBu)2(thd)2 (where M = Zr or Ti) as source reagents for MOCVD of PZT was examined and compared to M(OiPr)2(thd)2 analogues. In this case, higher process pressures were needed to improve the incorporation efficiencies of M(OtBu)2(thd)2 precursors.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 41 (11B), 6695-6700, 2002
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390001206255543424
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- NII論文ID
- 110006342012
- 210000052230
- 130004529166
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 6370750
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
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- 抄録ライセンスフラグ
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