Magnetic and Structural Properties of FePt Thin Film Prepared by Rapid Thermal Annealing.

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  • Itoh Yuji
    Department of Electronics and Computer Science, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi 274-8501, Japan
  • Takeuchi Makoto
    Department of Electronics and Computer Science, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi 274-8501, Japan
  • Tsukamoto Arata
    Department of Electronics and Computer Science, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi 274-8501, Japan
  • Nakagawa Katsuji
    Department of Electronics and Computer Science, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi 274-8501, Japan
  • Itoh Akiyoshi
    Department of Electronics and Computer Science, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi 274-8501, Japan
  • Katayama Toshikazu
    College of Pharmaceutical Sciences, Toho University, 2-2-1 Miyama, Funabashi 274-8510, Japan

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We fabricated the FePt film on thermal oxidized Si substrate by rapid thermal annealing (RTA), and investigated the order parameter and the orientation parameter as a function of annealing temperature. We also observed grains by a transmission electron microscope (TEM). The joining of the grains begins at between 300°C and 400°C, and this is the threshold for obtaining highly (001) oriented FePt films. We also clarify the difference in the magnetization and the structure between the films annealed from Pt/Fe (Fe-first) and from Fe/Pt (Pt-first) multilayers as the starting materials. The film annealed from the Fe-first multilayers has the perpendicular magnetization showing higher (001) orientation and magnetic anisotropy than the film annealed from the Pt-first multilayers.

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