SiO Mass Spectrometry and Si-2p Photoemission Spectroscopy for the Study of Oxidation Reaction Dynamics of Si(001) Surface by Supersonic O2 Molecular Beams under 1000 K
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- Teraoka Yuden
- Synchrotron Radiation Research Center, Japan Atomic Energy Research Institute
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- Yoshigoe Akitaka
- Synchrotron Radiation Research Center, Japan Atomic Energy Research Institute
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- Moritani Kousuke
- Synchrotron Radiation Research Center, Japan Atomic Energy Research Institute Department of Chemistry, Graduate School of Science, Osaka University
Bibliographic Information
- Other Title
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- SiO Mass Spectrometry and Si-2p Photoemmission Spectroscopy for the Study of Oxidation Reaction Dynamics of Si(001) Surface by Supersonic O2 Molecular Beams under 1000 K
- SiO Mass Spectrometry and Si-2p Photoemission Spectroscopy for the Study of Oxidation Reaction Dynamics of Si(001) Surface by Supersonic O<sub>2</sub>Molecular Beams under 1000 K
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Abstract
The Si18O desorption yield was measured in the Si(001) surface temperature region from 900 K to 1300 K at the 18O2 incident energies of 0.7 eV, 2.2 eV and 3.3 eV. The Si18O desorption yield in a surface temperature region higher than 1000 K increased with increasing incident energy, indicating the incident-energy-induced oxidation and the variation of angular distribution of Si18O desorption. Inversely, the Si18O desorption yield decreased with increasing incident energy in the region from 900 K to 1000 K, indicating the coexistence of the passive and the active oxidation. In order to clarify the reaction mechanisms of the later phenomenon, real-time in-situ Si-2p photoemission spectroscopy has been performed. The obtained Si-2p spectra showed the variation of the oxide-nuclei quality from the sub-oxide-rich structure to the SiO2-rich structure. The formation of the SiO2 structure suppresses the SiO desorption due to the enhanced O2 sticking at backbonds by the action of incident energy.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 42 (7B), 4671-4675, 2003
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390001206256426240
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- NII Article ID
- 10011446197
- 210000053876
- 130004531181
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- NII Book ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL BIB ID
- 6629514
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed