Investigation of Output Mechanical Power Limits on High-Torque Electrostatic Actuators Using High-Frequency Complementary Metal Oxide Semiconductor (CMOS) Camera Combined with Image Processing Software.
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- Walter Vincent
- Institut des Microtechniques de Franche Comté, Laboratoire de Mécanique Appliquée, Université de Franche Comté, 24 chemin de l'Epitaphe, 25030 Besançon Cedex, France
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- Moal Patrice Le
- Institut des Microtechniques de Franche Comté, Laboratoire de Mécanique Appliquée, Université de Franche Comté, 24 chemin de l'Epitaphe, 25030 Besançon Cedex, France
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- Minotti Patrice
- Institut des Microtechniques de Franche Comté, Laboratoire de Mécanique Appliquée, Université de Franche Comté, 24 chemin de l'Epitaphe, 25030 Besançon Cedex, France
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- Joseph Eric
- Institut des Microtechniques de Franche Comté, Laboratoire de Mécanique Appliquée, Université de Franche Comté, 24 chemin de l'Epitaphe, 25030 Besançon Cedex, France
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- Bourbon Gilles
- Institut des Microtechniques de Franche Comté, Laboratoire de Mécanique Appliquée, Université de Franche Comté, 24 chemin de l'Epitaphe, 25030 Besançon Cedex, France
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説明
The following work investigates output mechanical power limits of electrostatic micromotors using stator/rotor contact interactions. Loading characteristics of micrometer size motors monolithically coupled with elastic polysilicon torque sensors are measured through an high-frequency complementary metal oxide semiconductor (CMOS) camera combined with a specific image processing software. Short duration video sequences recorded during the rotor braking are analyzed by tracking of a target pixel attached to the tested devices. Output mechanical power limits are measured through electrostatic probing on the wafer level within a few milliseconds. Experiments point out an unusual mechanical power per mass unit which is as high as 100 W/gr, considering driving frequencies on the order of 100 kHz.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 41 (6B), L678-L681, 2002
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390001206256848384
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- NII論文ID
- 110006349698
- 210000052864
- 130004529765
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- NII書誌ID
- AA10650595
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 6172488
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可