Investigation of Output Mechanical Power Limits on High-Torque Electrostatic Actuators Using High-Frequency Complementary Metal Oxide Semiconductor (CMOS) Camera Combined with Image Processing Software.

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  • Walter Vincent
    Institut des Microtechniques de Franche Comté, Laboratoire de Mécanique Appliquée, Université de Franche Comté, 24 chemin de l'Epitaphe, 25030 Besançon Cedex, France
  • Moal Patrice Le
    Institut des Microtechniques de Franche Comté, Laboratoire de Mécanique Appliquée, Université de Franche Comté, 24 chemin de l'Epitaphe, 25030 Besançon Cedex, France
  • Minotti Patrice
    Institut des Microtechniques de Franche Comté, Laboratoire de Mécanique Appliquée, Université de Franche Comté, 24 chemin de l'Epitaphe, 25030 Besançon Cedex, France
  • Joseph Eric
    Institut des Microtechniques de Franche Comté, Laboratoire de Mécanique Appliquée, Université de Franche Comté, 24 chemin de l'Epitaphe, 25030 Besançon Cedex, France
  • Bourbon Gilles
    Institut des Microtechniques de Franche Comté, Laboratoire de Mécanique Appliquée, Université de Franche Comté, 24 chemin de l'Epitaphe, 25030 Besançon Cedex, France

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The following work investigates output mechanical power limits of electrostatic micromotors using stator/rotor contact interactions. Loading characteristics of micrometer size motors monolithically coupled with elastic polysilicon torque sensors are measured through an high-frequency complementary metal oxide semiconductor (CMOS) camera combined with a specific image processing software. Short duration video sequences recorded during the rotor braking are analyzed by tracking of a target pixel attached to the tested devices. Output mechanical power limits are measured through electrostatic probing on the wafer level within a few milliseconds. Experiments point out an unusual mechanical power per mass unit which is as high as 100 W/gr, considering driving frequencies on the order of 100 kHz.

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