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- NOMURA Setsuo
- Central Research Laboratory, Hitachi Ltd.
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- TODOKORO Hideo
- Central Research Laboratory, Hitachi Ltd.
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- KOMODA Tsutornu
- Central Research Laboratory, Hitachi Ltd.
Bibliographic Information
- Other Title
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- 透過電子線エネルギー分析法による微小領域の元素分析
- トウカ デンシセン エネルギー ブンセキホウ ニヨル ビショウ リョウイキ ノ
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Abstract
A scanning transmission electron microscope using a field emission gun is applied to elemental analysis of micro-areas, by means of electron energy loss spectrometry. The electron beam is focused to approximately 10Å diameter, and irradiates the specimen. Small particles are employed as specimens. A boron nitride particle, about 200Å in size, reveals sharp K-shell excitation edges of boron and nitrogen in its energy loss spectrum., These signals are estimated to be produced from the masses of 10-21 grams order. The spectrum obtained from a chromium dioxide fine crystal is compared with the spectrum of X-ray microanalysis. Although the signal-to-background ratio of the energy loss spectrum is inferior to the X-ray spectrum, the former can detect the light element, oxygen.<BR>Iron and oxygen are detected from a single ferritin particle, whose core is approximately 60A in size and composed of iron oxide hydrate molecules. The signal intensities are discussed, comparing with the ionization cross-sections.
Journal
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- Journal of the Spectroscopical Society of Japan
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Journal of the Spectroscopical Society of Japan 27 (2), 102-109, 1978
The Spectroscopical Society of Japan
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Details 詳細情報について
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- CRID
- 1390001206257767936
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- NII Article ID
- 130000941343
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- NII Book ID
- AN00222531
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- ISSN
- 18846785
- 00387002
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- NDL BIB ID
- 1940939
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed