Fabrication and Evaluation of a Thermoelectric Micro-Generator
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- KUROSAKI Jun-ichiro
- Department of Mechanical and Control Engineering, Kyushu Institute of Technology
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- YAMAMOTO Akihiro
- 九州工業大学大学院工学府
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- TANAKA Saburo
- 九州工業大学大学院生命体工学研究科生体機能専攻
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- MIYAZAKI Koji
- 九州工業大学工学研究院機械知能工学研究系
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- TSUKAMOTO Hiroshi
- 九州工業大学大学院生命体工学研究科生体機能専攻
Bibliographic Information
- Other Title
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- 熱電マイクロジェネレータの作製と評価
- ネツデン マイクロジェネレータ ノ サクセイ ト ヒョウカ
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Abstract
In this paper, we fabricated a Bi2Te3 thermoelectric micro-generator, and evaluated those performances. Bi2Te3 is one of popular thermoelectric materials with the highest thermoelectric properties at room temperature. The patterned thin film of Bi2Te3 was deposited on a free-standing Si3N4 thin film by using a flash evaporation method through shadow masks which were made by standard micro-fabrication processes. In the design of the micro-generators, we got the output voltages of the micro-generators by numerically calculating the temperature distribution of the freestanding thin film using ANSYS CFX. The calculated output voltages agreed well with experimental results. The output voltages of the fabricated micro-generators were measured while simply heating the bottom of the micro-device, and the maximum output voltage was 48 mV at a 13 K temperature difference.
Journal
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- TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B
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TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B 74 (748), 2630-2635, 2008
The Japan Society of Mechanical Engineers
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Details 詳細情報について
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- CRID
- 1390001206261096832
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- NII Article ID
- 130004081295
- 110007008071
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- NII Book ID
- AN00187441
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- ISSN
- 18848346
- 03875016
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- HANDLE
- 10228/3622
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- NDL BIB ID
- 9767495
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- Text Lang
- ja
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- Data Source
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- JaLC
- IRDB
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed
