Growth of mm-Long Carbon Nanotubes by Grid-Inserted Plasma-Enhanced Chemical Vapor Deposition
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- Kishimoto Shigeru
- Department of Quantum Engineering, Nagoya University
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- Kojima Yoshihiro
- Department of Quantum Engineering, Nagoya University
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- Ohno Yutaka
- Department of Quantum Engineering, Nagoya University
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- Sugai Toshiki
- Department of Chemistry, Nagoya University
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- Shinohara Hisanori
- Department of Chemistry, Nagoya University
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- Mizutani Takashi
- Department of Quantum Engineering, Nagoya University
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Vertically aligned long multi-walled carbon nanotubes (MWNTs) have been successfully grown by grid-inserted plasma-enhanced chemical vapor deposition (PECVD). A thin Fe (1 nm)/Ti (1 nm) double-layer catalyst was effective in growing the long MWNTs. The length of the MWNTs increased to 1 mm for the growth time of 120 min without growth termination. A thick Fe catalyst or thick Ti underlayer resulted in a low growth rate. Transmission electron microscopy, energy-dispersive X-ray analysis and thermo-gravimetric analysis (TGA) measurements suggest that the MWNTs were grown in a root growth mode. Moreover, the TGA measurements suggest that MWNTs of high quality/purity were successfully grown by grid-inserted PECVD with a double-layer catalyst.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 44 (4A), 1554-1557, 2005
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390001206264262912
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- NII論文ID
- 10015469509
- 130004533639
- 210000057531
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 7302032
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 使用不可