Optical Sensing Directional Acoustic Transducer with Grating Diaphragm Using Complementary Metal Oxide Semiconductor Compatible Micromachining Techniques

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In this paper, we present a new directional acoustic transducer using complementary metal oxide semiconductor (CMOS)-micro electro mechanical system (MEMS) micromachining techniques. The diaphragm of the acoustic transducer has a diffraction grating fabricated by the CMOS process requiring only a small number of post processes. The MEMS-based optical acoustic transducer transfers the displacement signal of the diaphragm with a grating pattern to a photodetector, which detects the vibrational displacement of the diaphragm based on changes in optical intensity. The same space conditions for the front and rear surfaces of the diaphragm can be achieved easily in this optical acoustic transducer. This arrangement allows a high directionality without sensitivity for side-on sounds, because the front and rear pressures of the diaphragm are in phase. The directional characteristics of our prototype acoustic transducer were measured, and a high directivity (6 dB attenuation at 30 deg) was confirmed.

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