Fabrication of Zn-Indiffused LiNbO3 Optical Waveguides by Diffusing Sol-Gel Spin-Coated ZnO Film at Low-Pressure Atmosphere

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  • Senthil Selvan Jayaraman
    Department of Electronic Engineering, Graduate School of Engineering, Osaka University
  • Fujimura Masatoshi
    Department of Electronic Engineering, Graduate School of Engineering, Osaka University
  • Suhara Toshiaki
    Department of Electronic Engineering, Graduate School of Engineering, Osaka University

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  • Fabrication of Zn-Indiffused LiNbO<sub>3</sub> Optical Waveguides by Diffusing Sol–Gel Spin-Coated ZnO Film at Low-Pressure Atmosphere

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Planar and channel waveguides supporting both extraordinary and ordinary polarization modes were fabricated by diffusing sol–gel spin-coated ZnO film into Z-cut congruent LiNbO3 at low-pressure atmosphere. The waveguide showing propagation losses of 0.2±0.1 dB/cm for extraordinary and 0.7±0.2 dB/cm for ordinary polarization modes at 1.5 μm wavelength was fabricated by diffusing 330 nm ZnO film at 890°C for 4 h in a low-pressure of 1 Torr. The effect of spin-coated ZnO film thickness and diffusion conditions on the waveguiding properties are discussed.

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