Fabrication of Sintered Silica Glass and its Vacuum Ultraviolet Transparency

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  • 粉末焼結法による高純度透明シリカガラスの作製と真空紫外透過特性
  • フンマツ ショウケツホウ ニ ヨル コウジュンド トウメイ シリカ ガラス ノ サクセイ ト シンクウ シガイ トウカ トクセイ

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Transparent silica glasses were obtained by sintering a green compact in diverse atmospheres. The green compacts were fabricated by slip-casting methods for high-purity silica glass powder. The relationships between sintering atmosphere and sintering temperature that result in transparent, sintered silica glass were shown. It was found that the transparency-forming region of sintered silica glass corresponds to a sintering temperature above 1400°C and high-vacuum (10−4 Pa) atmosphere conditions. We investigate the fabrication of transparent and hydroxyl-free silica glass by a powder-sintered method. The sintered silica glass with 10 ppm OH content exhibited the highest transmittance at 157 nm (76% for 2 mm sample thickness). Refractive index dispersion curves in the wavelength region of 0.194μm to 3.584μm are presented for the sintered silica glass by minimum deviation method.

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