Preparation of Monosized Silicon Micro Particles by Pulsated Orifice Ejection Method

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  • Dong Wei
    Micro Powder Research Institute
  • Takagi Kenta
    Department of Materials Processing, School of Engineering, Tohoku University
  • Masuda Satoshi
    Graduate School of Engineering, Tohoku University
  • Kawasaki Akira
    Department of Materials Processing, School of Engineering, Tohoku University

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Abstract

Monosized silicon particles with narrow particle size distribution have been successfully prepared by pulsed orifice ejection method (POEM). Monosized Silicon particles with desired size could be formed by adjusting process parameters of rod position, supplied pressure and rod displacement. The obtained silicon particles can be divided into two kinds according to their shapes. One is grape-fruit type silicon particles, which is polycrystalline and consists of many grains mainly in random boundaries. The other one is lemon type, which consists of only two or three grains in twin boundaries with cross-sections sometimes found to be single crystal.

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