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- 上條 栄治
- 龍谷大学理工学部物質化学科
書誌事項
- タイトル別名
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- A Study on Synthesis of Ceramics Thin Films by Ionplating Method.
- フンタイ フンマツ ヤキン キョウカイショウ ジュショウ キネン コウエン イ
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This paper review recent research on synthesis of ceramics thin films with ion beam assisted deposition, electron cyclotron resonance plasma sputtering deposition and vacuum arc ion plating deposition method. These deposition method are generally applied to that technique in which deposition and simultaneous ion bombardment of a growing film surface are performed with a low-energy activated particles. The effects of the bombardment during deposition may result in either physical, structural change in the chemical reaction. Examples include improved adhesion, preferred crystal orientation, improved stoichiometry and synthesis of diamond and cubic BN at room temperature. There remain however, important items of study that have not yet received sufficient attention. One may be study in atomic level of these modifications caused by the ion bombardment during the nucleation stage of film growth.
収録刊行物
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- 粉体および粉末冶金
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粉体および粉末冶金 44 (8), 721-728, 1997
一般社団法人 粉体粉末冶金協会
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詳細情報 詳細情報について
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- CRID
- 1390001206308368768
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- NII論文ID
- 10002014332
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- NII書誌ID
- AN00222724
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- ISSN
- 18809014
- 05328799
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- NDL書誌ID
- 4275735
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可