プラズマ気相反応によるＳｉＣ超微粒子粉末の作製

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  • 犬飼 隆
    日本電信電話公社茨城電気通信研究所

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タイトル別名
  • Preparation of Ultra Fine SiC Powders by Plasma Gas Phase Reaction
  • プラズマ キソウ ハンノウ ニヨル SiC チョウ ビリュウシ フンマツ ノ

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抄録

SiC powders having ultrafine grain size were prepared from CH3SiCl3 by means of plasma gas phase reaction in Ar gas atmosphere. The reaction was taken place in an induction plasma torch with a double tube or a triple tube. Powders obtained contain β-SiC, a small fraction of 2H-SiC, and even Si when the triple tube torch was used. Average grain size of β-SiC powders depends on the structure of the torches, the flow rate of the raw material, and the deposition place. The average grain size of β-SiC powders deposited at the torch tube under the flow rate of 5×10-4 mol/min is about 200A, and increases with increase of the raw material flow rate.

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